The FIB (Focused Ion Beam) is, in many ways, the ‘Swiss Army Knife’ of microscopy. These instruments operate in a number of modes and provide data, either directly or indirectly, through a number of approaches. That is, they can be used for preparation and direct observation of structural cross-sections, the preparation of transmission electron microscope (TEM) and atom probe (AP) specimens, the generation of microstructural data in three dimensions and in nanofabrication of devices and prototypes [P.R. Munroe].
FIB Zeiss Neon 40EsB CrossBeam
The NEON® 40EsB CrossBeam platform features the highly acclaimed benefit of a fully integrated energy and angle selective backscattered electron detector for advanced compositional information and ultra-high BSE imaging at very short working distances. The EsB detector is less sensitive for edge contrast and charging effects which enables precise feature imaging and reliable metrology. Equipped with the sophisticated Canion FIB the system allows fast and precise cross sectioning and TEM preparation. Delivering superb materials contrast and crystallographic imaging, the NEON® 40EsB is the instrument for all three dimensional analytical applications [Carl Zeiss NTS GmbH]
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Key Features:
SEM Resolution: 1.1 nm at 20 kV, 2.5 nm at 1 kV
SEM Probe Current: 4 pA - 20 nA
SEM Acceleration Voltage: 0.1 - 30 kV
SEM Emiter: Schottky Field Emiter
FIB Resolution: 7 nm at 30 kV guaranteed, 5 nm achievable
FIB Probe Current: 1 pA - 50 nA
FIB Acceleration Voltage: 2 - 30 kV
FIB Emiter: Ga liquid metal ion source (LMIS)
Gas Injection System: Up to 5 gases for selective etching, enhanced etching, material deposition, insulator deposition
Detectors: in-lens SE standard Everhart-Thorrnley SE-detector, EsB with filtering grid (BSE), Filtering grid voltage 0 - 1500 V, 4QBSD,
Specimen Chaber: 330 mm in diameter , 270 mm height, 2 x IR CCD-camera for sample viewing
Specimen Stage: 6-axes fully eucentric, all motorized
Image Acquisition: Resolution: from 512 x 384 to 3072 x 2304 pixel, Processing: Pixel averaging, frame averaging, continuous averaging
System Control: Integrated CrossBeam®/SmartSEMTM GUI based on Windows XP® operating system
Additional equipment:
QUANTAX EDS systems - ultimate analytical performance in microanalysis
XFlash® 5010, the light element specialist: This detector has excellent energy resolution, a ≤125 eV, The detection range spans the elements from beryllium to americium.
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