Data sheet:
TEM point resolution (nm) 0.27
TEM line resolution (nm) 0.144
Minimum focus step (nm) 2
TEM magnification range 25 x - 700 kx
Camera length (mm) 52 - 6,000
Maximum diffraction angle ±10°
STEM resolution (nm) 1.0
STEM magnification range 100 x - 5 Mx
Maximum tilt angle with double-tilt holder ±70°
Maximum tilt angle with tomography holder ±80°
EDS solid angle (srad) 0.13
Electron source
• LaB6 emitter
• Plate camera with 56 sheets of film
• Wide range of diffraction techniques, from coherent illumination for selected area diffraction or micro-diffraction to highly convergent (large angle) beam diffraction
• EDX microanalysis TIA
• Precession electron diffraction DigiStar and ASTAR for orientation- and phase mapping