MERLIN with the GEMINI II column and FEG electron source offers high resolution imaging using advanced detection modes, including InLens (SE), InLens (EsB), Angle Selective back-scattered detector (AsB), 3DSM and STEM. Gemini II optics imaging setting such as voltage or probe current can be adjusted without realignment. Parallel on-axis in-lens secondary electron (SE) and energy selective backscattered (EsB) detection can easily identify smallest differences in materials composition.

 

 

 

Electron source	Schottky Field Emission Gun (FEG)
Resolution	up to 0.6nm (STEM mode)
Probe current	up to 300nA
Acceleration voltage	20V to 30 kV
Detection Modes (selection)
In-lens (SE)	on-axis in-lens secondary electron detection
In-lens (EsB)	on-axis in-lens energy selective backscattered detection for advanced materials contrasts; parallel in-lens SE and EsB imaging
Angle selective backscattered Detector (AsB)	For crystallographic contrasts.
3DSM	For real time 3D surface topography visualization.
STEM	Low voltage optimized bright field, 4 quadrant dark field, and high angular dark field transmission imaging.
Application Modules (selection)
Local charge compensation	Image non-conducting samples without any compromises in detection.
Quantax 800	EDX microanalysis system
Quantax CrystAlign 400	EBSD analysis system