The FIB (Focused Ion Beam) is, in many ways, the ‘Swiss Army Knife’ of microscopy. These instruments operate in a number of modes and provide data, either directly or indirectly, through a number of approaches. That is, they can be used for preparation and direct observation of structural cross-sections, the preparation of transmission electron microscope (TEM) and atom probe (AP) specimens, the generation of microstructural data in three dimensions and in nanofabrication of devices and prototypes [P.R. Munroe].

FIB Zeiss Crossbeam 350

The CrossBeam 350 platform features the highly acclaimed benefit of a fully integrated energy and angle selective backscattered electron detector for advanced compositional information and ultra-high BSE imaging at very short working distances. The EsB detector is less sensitive for edge contrast and charging effects which enables precise feature imaging and reliable metrology. Equipped with the sophisticated Canion FIB the system allows fast and precise cross sectioning and TEM preparation. Delivering superb materials contrast and crystallographic imaging, the CrossBeam 350 is the instrument for all three dimensional analytical applications [Carl Zeiss NTS GmbH]

Data

SEM Resolution0.9nm at 15kV, 1nm at 1kV
SEM Probe Current2pA – 20nA
SEM Acceleration Voltage30V – 30kV
SEM EmiterSchottky Field Emiter
FIB Resolution3nm at 30kV
FIB Probe Current1pA – 100nA
FIB Acceleration Voltage500V – 30kV
FIB EmiterGa liquid metal ion source (LMIS)
Gas Injection System2x single GIS (C and Pt)
Detectorsin-lens SE standard Everhart-Thorrnley
SE2 – detector,
EsB with filtering grid (BSE), filtering grid voltage 0 – 1500 V, 4QBSD
Specimen Chaber330 mm in diameter , 270 mm height, 2 x  IR CCD-camera for sample viewing
Specimen Stage6-axes fully eucentric, all motorized
Image AcquisitionResolution: from 512 x 384 to 32072 x 24304 pixel, Processing: Pixel averaging, frame averaging, continuous averaging
System Control Integrated CrossBeam®/SmartSEMTM GUI

Additional equipment:

QUANTAX EDS systems – ultimate analytical performance in microanalysis

XFlash® 5010, the light element specialist: This detector has excellent energy resolution, a ≤125 eV, The detection range spans the elements from beryllium to americium.