Data sheet:

TEM point resolution (nm)0.27
TEM line resolution (nm)0.144
Minimum focus step (nm)2
TEM magnification range25 x – 700 kx
Camera length (mm)52 – 6,000
Maximum diffraction angle±10°
STEM resolution (nm)1.0
STEM magnification range100 x – 5 Mx
Maximum tilt angle with double-tilt holder±70°
Maximum tilt angle with tomography holder±80°
EDS solid angle (srad)0.13

Electron source

  • Flexible high tension (20, 40, 80, 120, 160, 200 kV and values in between)
  • LaB6 emitter

Imaging

  • High tilt and large field of view (± 70° tilt for TWIN and double-tilt holder)
  • Coma-free alignment for high resolution objective lens centering
  • Ranged, rotation-free magnification and diffraction series
  • Magnification reproducible within ± 1.5%
  • Embedded CCD and/or energy filter
  • Plate camera with 56 sheets of film

Diffraction

  • Wide range of diffraction techniques, from coherent illumination for selected area diffraction or micro-diffraction to highly convergent (large angle) beam diffraction
  • Energy filtered diffraction down to low camera length (<200 mm): maximum visible diffraction angle ± 125 mrad STEM
  • Fully digital scan system • Bright Field and High Angle Annular Dark Field mode
  • EDX microanalysis TIAPrecession electron diffraction DigiStar and ASTAR for orientation- and phase mapping