MERLIN with the GEMINI II column and FEG electron source offers high resolution imaging using advanced detection modes, including InLens (SE), InLens (EsB), Angle Selective back-scattered detector (AsB), 3DSM and STEM. Gemini II optics imaging setting such as voltage or probe current can be adjusted without realignment. Parallel on-axis in-lens secondary electron (SE) and energy selective backscattered (EsB) detection can easily identify smallest differences in materials composition.
Data
| Electron source | Schottky Field Emission Gun (FEG) |
| Resolution | up to 0.6nm (STEM mode) |
| Probe current | up to 300nA |
| Acceleration voltage | 20V to 30 kV |
| Detection Modes (selection) | |
| In-lens (SE) | on-axis in-lens secondary electron detection |
| In-lens (EsB) | on-axis in-lens energy selective backscattered detection for advanced materials contrasts; parallel in-lens SE and EsB imaging |
| Angle selective backscattered Detector (AsB) | For crystallographic contrasts. |
| 3DSM | For real time 3D surface topography visualization. |
| STEM | Low voltage optimized bright field, 4 quadrant dark field, and high angular dark field transmission imaging. |
| Application Modules (selection) | |
| Local charge compensation | Image non-conducting samples without any compromises in detection. |
| Quantax 800 | EDX microanalysis system |
| Quantax CrystAlign 400 | EBSD analysis system |
